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XY movements on an air bearing driven by a planar servo stepper motor with integrated position measurement. Suitable for overhead use as well as vacuum operation.

Planar servo motors LMSP feature integrated position sensors and operate with position control (closed loop).

XY Table

• Closed loop control through integrated position measurement
• Stepper motor enables simple drive electronics
• Wear-free air bearing
• No externally measurable magnetic fields
• Practically no heating
• Can be installed overhead
• Stator surface up to 1000×1000 mm
• Vacuum compatible